专利摘要:
The invention relates to an autofocus camera (1) comprising: - an image sensor (10), - an optical block (20) comprising a plurality of lenses with fixed focal length, - a variable-focus optical device (30) comprising: A deformable membrane (301), a support (302) to which a peripheral anchor zone (301c) of said membrane is bonded, a cavity (303) filled with a constant volume of a fluid, said cavity being defined at least in part by said membrane (301) and a wall of the support (302), • a device (304) for actuating a region (301b) of the membrane located between the peripheral anchoring zone (301c) and a central portion (301a) of the diaphragm configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume toward the center or periphery of the cavity (303), wherein at least one region separate from the central portion (301a) and the act region ionisation (301b) of the membrane is mechanically stressed permanently so as to cause permanent deformation of the central portion of the membrane by the fluid, the focal length of the optical device (30) at rest under the effect of said mechanical stress being different from the focal length of said optical device at rest before the application of said bias.
公开号:FR3029644A1
申请号:FR1461907
申请日:2014-12-04
公开日:2016-06-10
发明作者:Sebastien Bolis
申请人:WAVELENS;
IPC主号:
专利说明:

[0001] FIELD OF THE INVENTION The present invention relates to an autofocus camera, a variable-focus optical device intended to be integrated in such a camera, and a manufacturing method. BACKGROUND OF THE INVENTION of such a camera. BACKGROUND OF THE INVENTION Figure 1 is an exploded view of an example of a fixed focus miniature camera. Such a camera 1 comprises an image sensor 10 arranged on a substrate 11, an optical unit 20 comprising several lenses 20a, 20b, 20c assembled in a barrel 21, and a frame 22 with which the substrate 11 and the barrel 21 are assembled. At the output of manufacture of such a camera, a focusing operation is generally necessary so that the objects located at infinity and captured by the camera are clear. This focusing operation consists of moving the barrel 21 containing the lenses relative to the image sensor 10 while making acquisitions of images of an object (typically a pattern) placed at infinity or at least a sufficiently large distance from the camera. The movement of the barrel is generally ensured by a rotation of said barrel in the mount by cooperation of a thread 210 of the barrel and a tapping 220 of the frame. An analysis of the images during this movement makes it possible to determine the position of the barrel which corresponds to the maximum sharpness of the image. The barrel 21 is then fixed in this position in the frame 22, for example by performing a local weld at the junction between the frame 22 and the barrel 21. Other cameras include a function called "autofocus" which consists in automatically ensuring the sharpness of a captured object, whether it is infinite or close to the camera. To ensure this function, a common solution is to integrate a variable-focus optical device at the front of the camera, that is to say upstream of the fixed optical block on the path of the light towards the sensor. images. Among the optical devices that can be used for this purpose, the devices comprising a deformable membrane can be chosen advantageously. The documents FR2919073, FR2950154 and FR2950153 describe examples of such deformable membrane devices. These devices generally comprise: at least one deformable membrane; a support to which a peripheral anchoring zone of said membrane is bonded; a cavity filled with a constant volume of a fluid, said cavity being delimited in part by said membrane; a device for actuating a zone of the membrane situated between the peripheral anchoring zone and a central part of the membrane, configured to flex by applying an actuating electric voltage 5 so as to displace part of the volume of fluid towards the center or the periphery of the cavity. FIG. 2 is an exploded view of an autofocus camera 1 incorporating an optical device with variable focal length. The elements designated by the same reference signs as in FIG. 1 fulfill the same function and are therefore not described again.
[0002] The optical zoom device comprises an optical zone whose focal length is adjustable and an electrical connection device to the substrate. In general, the infinite focus is achieved before the integration of the optical zoom device. Indeed, once the optical device with variable focal length 30 set up, it is no longer possible to access the barrel 21 containing the fixed optics to move it because of the presence, in front of the barrel 21, of the device optical zoom lens 30 and the connection 31 thereof with the substrate 11, which prevents rotation of the barrel 21 in the frame 22. There are two methods to achieve the focus of the camera before the integration of the device optical zoom.
[0003] A first method is based on the same principle as for cameras with fixed focal length, namely the displacement of the barrel comprising the optical block relative to the frame so as to ensure the sharpness of the image of an object located at the infinite. In this case, the optical zoom device must have zero optical power (0 diopters) to maintain the focus of objects at infinity. To focus on an object near the camera, a positive optical power of the order of 10 diopters is typically required. The range of optical power that must be able to provide the optical device with variable focus therefore comprises at least the range between 0 and 10 diopters. Although this is less common, it is also possible to focus at a finite distance, for example 20 cm. In this case, the optical device with variable focal length must have zero optical power (0 diopter) to maintain the focus of objects at this distance of 20 cm. In this example, to focus an object 10 cm from the camera, a positive optical power of the order of 5 diopters is typically required. An infinite object is sharp for an optical power of -5 35 diopters. The range of optical power that must be able to provide the optical device with variable focus therefore includes at least the range between -5 and +5 diopters. Compared to focusing at infinity, focusing at 20 cm results in a -5 diopter shift in the operating range of the optical zoom device.
[0004] However, certain optical devices can see their optical power vary according to the temperature of use of the camera. Moreover, the manufacture can induce optical power dispersions. Therefore, to ensure the coverage of the required optical power range 5, it may be advantageous or necessary to ensure that the optical device with variable focal length is slightly divergent at the output of manufacture, for example of the order of -1 at -5 diopters, even -10 dioptres in some cases. From a nominal configuration so divergent, it guarantees the passage to 0 diopter and thus the focus at infinity. On the other hand, focusing in close proximity, requiring about 10 diopters of optical power, is difficult to achieve and requires a variation in optical power all the greater as the rest position is divergent: a variation of 11 diopters for initial position of -1 diopter, a variation of 15 diopters for an initial position of -5 diopters, etc.). This principle of operation always requires an actuation of the variable-focus device, whether to focus at infinity or close to, for example at 20 cm as in the example developed above, and this, regardless of the operating range of the optical device with variable focal length (for example [0; 10] dioptres or [-5; +5] dioptres as in the cases explained above). FIG. 3A illustrates an example of variation of the optical power of a variable focus device for an autofocus camera developed according to this first method. In this example, we consider a linear variation of the optical power P (in diopters) with the voltage U (in volts) applied to the actuating device of the optical device with variable focal length. The optical power at rest (that is to say without application of a voltage) is -5 diopters in this example. This diagram shows two operating ranges of the device: a first range (rising hatching from the left to the right) between -5 and 0 diopters is only intended to compensate for variations in optical power due to manufacturing dispersions and / or temperature variations. a second range (left-to-right descending hatching) between 0 and 10 diopters makes it possible to focus at infinity and close to the camera. The first 3 volts applied to obtain zero optical power are useless for the development and can be considered as lost; the focusing is carried out in the voltage range between 3 and 10 V.
[0005] In a second focusing method, the barrel comprising the optical block with respect to the frame is moved, as in the previous method, so as to ensure the sharpness of the image of an object situated at infinity; however, once the infinite focus is achieved, a defocusing is intentionally introduced by a movement of the barrel relative to its optimum position if the optical power of the variable focus device is not zero. Alternatively, instead of focusing at infinity and then defocusing, the optical device can be focused directly at a shorter distance. If the optical power of the optical zoom device is zero, it must be focused to infinity. This particular focus is designed to compensate exactly the initial optical power of the variable focus device which is then integrated into the camera. In other words, the whole of the optical block and the variable-focus device at rest must make it possible to focus at infinity, an operation being necessary only to ensure the focusing in the vicinity.
[0006] FIG. 3B illustrates an example of variation of the optical power of the same variable focus device as that of FIG. 3A for an autofocus camera developed according to this second method. The optical power at rest (that is to say without application of a voltage) is -5 diopters, which is offset by a defocus of the fixed optics of the camera of 5 diopters or a direct focus on 15 an object located 20 cm from the camera. In this case, a variation of the optical power of 10 diopters (from -5 to 5 diopters) is therefore sufficient to achieve the focus at infinity and close. This corresponds to an operating voltage range of between 0 and 7 V. Compared to the first focusing method, this second method 20 has the advantage that the entire range of variation of the optical power (and therefore the operating voltage range) is used for focusing. Moreover, the operating voltage range is reduced. On the other hand, a major disadvantage of this method is that the output dispersion of the devices with variable focal length must be low and well controlled, which is very restrictive.
[0007] On the other hand, in the absence of an operating range to compensate for the effects of the temperature on the idle focal length of the device, the camera's operating temperature is likely to directly affect the focus. from the camera. BRIEF DESCRIPTION OF THE INVENTION An object of the invention is to remedy these drawbacks and to propose an autofocus camera comprising an optical device with variable focal length whose development is simpler than in existing cameras and which makes it possible to optimize the energy necessary for the operation of said camera. According to the invention, there is provided an autofocus camera comprising: - an image sensor, - an optical unit comprising a plurality of lenses with fixed focal length, - an optical device with variable focal length comprising: - a deformable membrane, 3029644 A support to which a peripheral anchoring zone of said membrane is bonded; a cavity filled with a constant volume of a fluid, said cavity being delimited at least in part by said membrane and a wall of the support; a device for actuating a region of the membrane situated between the peripheral anchoring zone and a central part of the membrane, configured to flex by application of an electrical operating voltage so as to displace a part of the volume of fluid to the center or periphery of the cavity, wherein at least a region distinct from the central portion and the membrane actuation region is mechanically biased Ie permanent so as to cause permanent deformation of the central portion of the membrane by the fluid, the focal length of the optical device at rest under the effect of said mechanical stress being different from the focal distance of said optical device at rest before the application of said solicitation. By "optical device at rest" is meant that no voltage is applied to the actuating device. According to other advantageous characteristics of said camera: said mechanical stress comprises a force, a pressure or a moment; the support comprises a first substrate defining the bottom of the cavity and a second substrate integral with the anchoring zone of the membrane, the first substrate and the second substrate being linked by a bead of adhesive defining a circumferential wall of the cavity; The solicited region is located in the second substrate; the region requested is a locally thinner region of the second substrate; the stressed region is a region of the second substrate through which the anchoring zone of the membrane is exposed directly to said biasing; the region requested is a locally thicker region of the second substrate; The solicited region is located in the bead of glue; the stressed region is located in the first substrate; the cavity containing the fluid is divided between a central cavity facing the central part of the membrane and a peripheral cavity in fluid connection with the central cavity by at least one channel, and the stressed region is opposite said peripheral cavity ; - the permanent mechanical stress is exerted by at least one protrusion extending from the optical block to the biased region of the variable-focus device; The camera comprises interconnection pads providing an electrical connection between the image sensor and respective electrical contacts of the optical device with variable focus arranged in the region requested, the permanent mechanical stress being ensured by said interconnection pads. ; The image sensor, the optical block and the variable-focus device are each integrated in a substrate and in that said substrates form a stack; the optical block and the variable-focus device are arranged in a frame secured to the image sensor; the coefficients of thermal expansion of the means for applying the permanent mechanical stress are chosen so as to compensate for any temperature drift in the optical power at rest of the optical device with variable focal length and / or the optical block. Another object relates to a variable-focus optical device intended to be integrated with such a camera. This device comprises: - a deformable membrane, - a support to which a peripheral anchoring zone of said membrane is bonded, - a cavity filled with a constant volume of a fluid, said cavity being delimited at least in part by said membrane and a wall of the support, - a device for actuating a region of the membrane located between the peripheral anchoring zone 20 and a central part of the membrane, configured to flex by application of an electrical operating voltage so as to move a portion of the fluid volume to the center or to the periphery of the cavity. This device is characterized in that it comprises at least a region distinct from the central portion and from the membrane actuation region configured to be mechanically permanently biased by a component of the autofocus camera so as to cause a permanent deformation of the membrane by the fluid, the focal length of the optical device at rest under the effect of said mechanical stress being different from the focal distance of said optical device at rest before the application of said bias.
[0008] Another object relates to a method of manufacturing an autofocus camera as described above. This method comprises: the assembly of the optical block on the image sensor; the assembly of the optical device with variable focus on the assembly formed of the optical block and the image sensor, said assembly comprising the application a mechanical bias on a region of said device distinct from the central portion and the region of actuation of the membrane, said biasing having the effect of displacing a portion of the fluid volume and deforming the central portion of the membrane , so as to vary the focal length of the optical device at rest, - simultaneously with the application of said mechanical stress, the analysis of images acquired by the camera and the determination of a mechanical stress generating the development 5 sought, - the finalization of the assembly so as to permanently apply said determined mechanical stress. BRIEF DESCRIPTION OF THE DRAWINGS Other features and advantages of the invention will emerge from the detailed description which follows, with reference to the appended drawings in which: FIG. 1 is an exploded view of an example of a miniature camera with fixed focal length; FIG. 2 is an exploded view of an example of a miniature autofocus camera; FIG. 3A illustrates an example of variation of the optical power of a variable focus device for an autofocus camera developed according to a first method. 3B illustrates an example of variation of the optical power of a variable focus device for an autofocus camera developed according to a second known method, FIG. 4 illustrates an example of variation of the optical power of a variable-focus device for an autofocus camera according to the invention; - FIGS. 5A and 5B are sectional views of a deformable membrane optical device diverging with respect to pos (Fig.
[0009] 5A) and becoming convergent under the application of an electrical operating voltage (Fig.
[0010] 5B), FIGS. 6A and 6B illustrate a first embodiment of the invention, in which the optical power at rest is varied from an initial configuration (FIG.
[0011] 6A) by exerting a permanent stress on a substrate on which is anchored the membrane of the optical device (Fig.
[0012] 6B); FIGS. 7A and 7B illustrate a second embodiment of the invention in which the optical power at rest is varied from an initial configuration (FIG.
[0013] 7A) by exerting a permanent stress on a bead of adhesive bonding the substrate on which is anchored the membrane and the support of the optical device (Fig.
[0014] 7B); FIGS. 8A and 8B illustrate a third embodiment of the invention, in which the optical power at rest is varied from an initial configuration (FIG.
[0015] 8A) by exerting a permanent stress on the support of the optical device (FIG.
[0016] 8B), FIGS. 9A and 9B are sectional views of an optical device whose substrate has a specific structure facilitating the application of a permanent bias, before (FIG.
[0017] 9A) and after (Fig.
[0018] 9B) the application of said bias, - Figures 10A to 10D illustrate, in top view, different embodiments of said structure, - Figure 11 illustrates another embodiment of a specific structure of the substrate. 12A and 12B illustrate another embodiment of a specific structure of the substrate facilitating the application of a permanent bias, respectively in a top view of the optical device and in partial plan view of the fluid and the bead of adhesive, FIG. 13A is a sectional view of a camera according to an embodiment, before its assembly ("waferlevel" assembly), FIGS. 13B and 13C are respectively a bottom view of the optical device and a top view of the optical block of said camera; - FIG. 14A is a sectional view of a camera according to one embodiment, before its assembly ("waferlevel" assembly), the figures 14B and 14C are respectively a bottom view of the optical device and a top view of the optical block of said camera, FIG. 15 is a sectional view of a camera according to an embodiment, before its assembly (mounting 16) is a sectional view of a camera according to an embodiment, before its assembly (traditional assembly), FIGS. 17A and 17B illustrate two steps of the development of the camera 25 during of the assembly of the optical device, according to one embodiment of the invention, in the case of a "waferlevel" assembly, - FIGS. 18A and 18B illustrate two stages of the development of the camera during the assembly of the optical device, according to one embodiment of the invention, in the case of a traditional assembly, - Figure 19 is a sectional view of a deformable membrane optical device on which two pads of interconnection have been shown, FIGS. 20A and 20B are cross-sectional views of the optical block comprising interconnections intended to be coupled to the pads of the optical device, respectively in the case of a "waferlevel" assembly and in the case of conventional mounting, FIG. 21 is a view in section of the optical block and of two interconnections arranged outside said block, FIGS. 22A and 22B illustrate two stages of the development of the camera during the assembly of the optical device, in a form of FIG. In the embodiment of the invention, in the case of a "waferlevel" circuit, FIG. 23 is a plan view of an optical device comprising two interconnect pads and two structures in the substrate to facilitate application. 24A to 24C are cross-sectional views of embodiments of the optical device with different arrangements of the interconnection pads at the level of the mechanical biasing areas, FIGS. a sectional view of an assembled camera ("waferlevel" assembly); - FIG. 26 is a sectional view of an assembled camera (traditional assembly); FIG. 27 is a sectional view of an assembled camera; (traditional assembly), Figs. 28A, 28B, 28C are respectively a sectional view of a threaded assembly, a top view of the hood and a bottom view of the counterpart, Figs. 29A and 29B illustrate two steps of focusing the camera during assembly of the optical device, according to one embodiment of the invention, in the case of a traditional mounting. For reasons of readability of the figures, the various elements illustrated are not necessarily represented on the same scale. The same reference signs are used from one figure to another to designate the same elements.
[0019] DETAILED DESCRIPTION OF THE INVENTION The camera is made by assembling various components, the main ones of which are: an optical block comprising a plurality of lenses with fixed focal length, permanently assembled on the camera with a controlled positioning. The optical block is not intended to be moved. The positioning accuracy of the optical block with respect to the image sensor is related to the chosen transfer technique; a variable-focus optical device generally arranged upstream of the optical block in the path of the light towards the image sensor (optionally, the optical device with variable focal length can be integrated in the optical block or even downstream of the optical block on the path of light). As will be seen in detail below, said optical device has the particularity of being able to vary its optical power at rest (that is to say without voltage applied to the actuating device) by mechanically soliciting at least one of its regions other than the central part of the membrane and the actuation region. This mechanical stress (force, pressure or moment) has the effect of displacing a portion of the fluid volume, which results in a deformation of the central portion of the membrane. Since the mechanical stress is permanent, the deformation of the central part of the membrane is permanent. The optical power is thus permanently changed with respect to the optical power of the device before the application of this request. This bias does not, however, affect the zooming performance of the optical device under tension; one or more structures for soliciting the variable-focus device during the debugging step. This structure (s) can be integrated (s) on the optical device with variable focal length and / or on the optical block (lens or mount). The focusing of the camera is carried out from said assembly, by more or less soliciting a region of the variable-focus device intended to vary the initial optical power through the structure provided for this purpose. An analysis of the images during the application of this solicitation (generally including the modulation transfer function (MTF)) makes it possible to determine the ideal bias which corresponds to the maximum sharpness of the image. Once the optimal focus is identified, the assembly is frozen in the state to maintain the bias applied to the variable focus device permanently over time.
[0020] When assembling the various components, the average position of the optical block with respect to the image sensor (and the associated dispersion) must be determined according to the focal length of the optical unit and the optical power variation at rest. achievable by mechanically biasing the variable focus device. For a variable focus device whose optical power increases under the effect of a mechanical bias, it is advantageous to place the optical block with respect to the image sensor at a distance less than the focal length of said optical block. Thus by soliciting the variable-focus device and increasing the optical power of the latter, the camera can be infinitely adjusted. Likewise, for a device with variable focal length whose optical power decreases under the effect of a mechanical stress, it is advantageous to place the optical block with respect to the image sensor at a distance greater than the focal length of said block. optical. Thus, by mechanically biasing the variable-focus device and decreasing the optical power of the latter, infinite focusing can be achieved. In either case, the initial optical power variation range must be able to compensate for the (approximate) position of the optical block with respect to the focal length. FIG. 4 illustrates an example of variation of the optical power of a variable focus device for an autofocus camera according to the invention, whose operating range is between -5 and +5 diopters. Of course, this example can be transposed to any other operating range. In this example, the initial optical power (before the application of mechanical stress) of the device is -7 diopters. The optical block is positioned at a distance from the image sensor less than the focal length. By permanently mechanically soliciting the optical device, the optical power is increased up to -5 diopters, which makes it possible to focus at infinity (the defocusing of the optical block at the time of assembly was in this case). case of -2 diopters). The present invention makes it possible to benefit from the advantages of the two known approaches described with reference to FIGS. 3A and 3B without the disadvantages. Indeed, the entire range of optical power of the device with variable focal length (10 diopters) remains exploited. The constraint on the dispersion of the rest position at the output of the production of the devices with variable focal length is relaxed, insofar as the stress exerted during the focusing operation is able to compensate for this dispersion and to allow the operation of focus. This solution is particularly advantageous for "low resolution" cameras for which the focusing operation is mostly avoided, for technical and economic reasons. The present invention provides a development solution for these cameras compatible with the requirement of very large footprint and with a manufacture of "waferlevel" type. Finally, such a solution may possibly make it possible to compensate for the effect of the temperature on the initial optical power of the variable-focus device, if necessary. In temperature, the permanent mechanical stress exerted on the variable-focus device can advantageously be sized to counterbalance the possible variation of the initial optical power of the device and possibly the optical block. In a first step, various embodiments of the optical device with variable focal length will be described. As indicated above, said optical device has the particularity of being able to vary its initial optical power (i.e. without applied electric voltage applied) by soliciting at least one of its surfaces. Optical MEMS with a deformable membrane comprising a fluid are particularly advantageous. It will be noted that, in FIGS. 5A to 18B, the electrical interconnection pads of the optical device with variable focal length are not shown for reasons of simplification and not to overload the drawings.
[0021] In the example illustrated in FIGS. 5A and 5B, the optical device 30 is slightly divergent at rest (FIG. 5A) and converges in operation (FIG. 5B). The device 30 comprises a deformable membrane 301, a support 302 to which a peripheral anchoring zone 301c of said membrane is bonded, and a cavity 303 filled with a constant volume of a fluid, said cavity being delimited at least by part by the membrane 301 and a wall of the support 302. The membrane comprises a central portion 301a which defines an optical field of the optical device.
[0022] The membrane thus comprises a face, said inner face, which is in contact with the fluid, and an opposite face, said outer face, which is in contact with a second fluid, which may be ambient air. The fluid is advantageously a liquid such as propylene carbonate, water, a liquid index, an optical oil or an ionic liquid, a silicone oil, an inert liquid with high thermal stability and low saturation vapor pressure. By membrane is meant any flexible and waterproof film, so that the membrane forms a barrier between the fluid contained in the cavity and the fluid on the opposite side of the membrane. The membrane can be made from organic materials such as polydimethylsiloxane, polymethylmethacrylate, polyethylene terephthalate, polycarbonate, parylene, epoxy resins, photosensitive polymers, silicones, or inorganic materials such as silicon. , silicon oxide, silicon nitride, polycrystalline silicon, diamond carbon. The membrane may consist of a single layer of the same material or a stack of layers of different materials.
[0023] The optical device operating in transmission, the membrane and the bottom of the cavity are transparent, at least in their central part, to an optical beam intended to propagate through the lens, passing successively through the central part of the membrane, the fluid and the bottom of the cavity. The fluid is sufficiently incompressible to move towards the central portion of the device when a force is applied to the membrane in the direction of the fluid, this force being applied in an intermediate portion 301b between the anchoring zone and the central portion. of the membrane. The support 302 may comprise a first substrate 302a (for example glass) defining the bottom of the cavity and a second substrate 302b (for example of silicon) 30 integral with the anchoring zone 301c of the membrane, the first substrate and the second substrate being bonded by an adhesive bead 302c defining a circumferential wall of the cavity 303. A device 304 for actuating a region 301b of the membrane (called the "actuation region") situated between the peripheral anchoring zone 301c and a central portion 301a of the diaphragm is configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume toward the center or periphery of the cavity 303.
[0024] The person skilled in the art knows various actuating devices that can be used to actuate membranes. These devices are based on various technologies, among which include piezoelectric actuation, electrostatic actuation, electromagnetic, thermal or based electro-active polymers. In this regard, reference can be made to a detailed description of such actuating devices in the documents FR2919073, FR2950154 and FR2950153. The choice of actuation technology and the dimensioning of the actuator depends on the expected performance (e.g. electrical consumption), the stresses to which it will be subjected during operation of the device, as well as the voltage considerations. actuation to apply. For example, a particularly effective actuator relies on piezoelectric technology. It will be recalled that a piezoelectric actuator comprises a block of piezoelectric material totally or partially sandwiched between two electrodes intended, when energized, to apply an electric field to the piezoelectric material. This electric field is used to control a mechanical deformation of the block of piezoelectric material. The block of piezoelectric material may be monolayer or multilayer and extend beyond an electrode. Preferably, PZT is chosen as the piezoelectric material. The actuating device may comprise a single actuator in the form of a ring or of several distinct actuators (for example in the form of beams) regularly distributed over the circumference of the membrane. Optionally, the actuators may be capable of bending in two opposite directions. The actuating device can be arranged on the inner face of the membrane, on the outer face or inside the membrane. Optionally, the actuating device may extend in part over the peripheral anchoring zone.
[0025] Many other scenarios are conceivable and not illustrated. The optical device at rest can in particular be convergent or even plane (zero optical power). In operation, it can become divergent instead of convergent as shown in Figure 5B. For such an optical device, it is possible to modify the optical power of the device at rest (that is to say in the absence of application of an electrical operating voltage) under the effect of a mechanical stress exerted on the structure of the optical device, in a region distinct from the central part of the membrane and the actuating region. If such an optical device is integrated into a known type of camera, such a phenomenon of variation of the focal length must be limited. On the contrary, the invention provokes this phenomenon and takes advantage of it. The operating principle of such an optical device is to exert, via the actuating device, a pressure in the fluid intended to deform the center of the membrane and thus modify the focal length (or even the optical power). Such focal length variation is also possible without applying electrical voltage to the device but deforming, by external stress, the external structure of the optical device, which generally comprises a glass substrate, glue and a silicon substrate.
[0026] A first embodiment of the invention does not require any particular structure for exerting this stress, but consists of dimensioning the outer envelope of the optical device (glass substrate, glue or silicon substrate) so that it can be deformed under the effect of external stress. Depending on the geometry of these different elements, the thickness of at least one element of the outer casing can be reduced to make it deformable under the effect of the envisaged mechanical stress. The examples illustrated in FIGS. 6A to 8B correspond to a variable-focus device similar to that illustrated in FIGS. 5A-5B, whose optical power increases under the effect of a mechanical stress S. The fluid movements induced by the bias towards the center of the cavity are represented by the arrows f. In the case of Figure 6B, the mechanical stress S is applied to the substrate 302b, in a direction substantially perpendicular to the surface of said substrate and to the anchoring zone 301 of the membrane. With respect to the device prior to the application of this bias (FIG. 6A), the fluid displacement has the effect of reducing the curvature of the central portion 301a of the membrane, that is to say of making the optical device less diverge. In the case of Figure 7B, the mechanical bias S is applied to the adhesive bead 302c binding the substrates 302a and 302b, in a direction substantially perpendicular to the circumferential wall of the cavity 303. Compared to the device prior to application of this bias (Figure 7A), the fluid displacement has the effect of reducing the curvature of the central portion 301a of the membrane, that is to say, to make the optical device less divergent. In the case of Figure 8B, the mechanical stress S is applied to the substrate 302a, in a direction substantially perpendicular to the surface of said substrate. With respect to the device prior to the application of this bias (FIG. 8A), the fluid displacement has the effect of reducing the curvature of the central portion 301a of the membrane, that is to say of making the optical device less diverge.
[0027] In some embodiments, the mechanical bias may be applied in a localized, non-symmetrical manner with respect to a plane or axis of symmetry of the optical device. Alternatively, the bias can be applied symmetrically.
[0028] In the case of FIGS. 6A to 8B, the mechanical bias has the effect of driving more liquid towards the center of the cavity to increase the initial optical power of the device. However, it is possible to configure said mechanical stress to reduce the amount of fluid in the center of the cavity to reduce the optical power of the device.
[0029] Furthermore, a combined mechanical stress on the different elements of the optical device constituting its outer envelope (ie the two substrates 302a, 302b and the adhesive bead 302c) is also possible. In any event, the mechanical stress is applied neither in the central portion 301a of the diaphragm nor in the actuation zone 301b in order to preserve the electro-optical performance of the optical device as much as possible after the setting operation. on point. It may be advantageous to provide particular structures in the optical device to facilitate the variation of optical power under the effect of mechanical bias or to facilitate the application of the bias to the desired region of the optical device. Thus, as illustrated in FIGS. 9A and 9B, the substrate 302b can be locally etched so as to form a groove 3020 over the entire thickness of said substrate, to exert the mechanical stress S directly on the anchoring zone 301c of the membrane which deforms more easily than the substrate.
[0030] Figures 10A to 10D show, in top view, different arrangements of a structure in the substrate 302b for applying the mechanical stress directly to the anchoring zone 301c of the membrane. In the case of FIG. 10A, the structure is an annular groove 3020 formed in the substrate 302b so as to expose a portion of the anchoring zone 301c of the membrane. This groove 3020 surrounds the central portion 301a and the zone comprising the actuator 304 of the membrane. In the case of Figure 10B, the structure is a circular hole 3021 formed in the substrate 302b so as to expose a portion of the anchoring zone 301c of the membrane. In the case of Figure 10C, the structure is composed of two oblong holes 3021 formed in the substrate 302b so as to expose a portion of the anchoring zone 301c of the membrane. These oblong holes are for example diametrically opposite to the central portion 301a of the membrane, and oriented so that their main axes are perpendicular.
[0031] In the case of Figure 10D, the structure is composed of two square holes 3021 formed in the substrate 302b so as to expose a portion of the anchoring zone 301c of the membrane. These square holes are for example diametrically opposite to the central portion 301a of the membrane.
[0032] The structure provided for the application of the mechanical bias can also fulfill a function of mechanical centering of the optical device with respect to the optical block. In this perspective, the embodiments of FIGS. 10A, 10C and 10D, which make it possible to control this centering, are particularly advantageous. There are many other forms of possible structures. These structures 10 may be formed over the entire thickness of the substrate 302b as shown in FIGS. 9A-9B to disengage another constituent element of the optical device (for example the membrane as illustrated in this example) or only on part of the thickness (for example in the form of a hole or groove whose depth is less than the thickness of the substrate) (embodiment not shown).
[0033] Another embodiment is to create a protuberance 3022 on the surface of the substrate 302b to facilitate biasing this region during the subsequent focusing operation (see FIG. 11). Such a solution may make it possible to avoid the integration of additional structure (s) at the level of the optical unit to apply the request.
[0034] The set of examples detailed below can also be applied to the substrate 302a and / or to the adhesive bead 302c. In all cases, the region or regions of the optical device on which the mechanical bias is applied must be able to move fluid towards the central zone of the cavity (or vice versa) in order to have an effect on the optical power at rest of the device 25. optical. In the examples described above, the fluid is present on the entire surface of the optical device. It is also possible to minimize the amount of fluid by limiting it to the central zone of the membrane and to the operating zone. In this case, as illustrated in FIGS. 12A-12B, channels 303c may be provided between a central cavity 303a of the optical device and a peripheral cavity 303b in contact with the anchoring zone 301c of the membrane, intended to be requested. to adjust the initial optical power. Thus, a mechanical stress applied to a portion of the anchoring zone 301c has the effect of driving a portion of the fluid contained in the peripheral cavity 303b to the central cavity 303a through a channel 303b.
[0035] The structure or structures intended to be integrated on the optical block may be varied and depend strongly on the solutions chosen to assemble the fixed optical block in the camera, any structures provided on the optical device and solutions that will be chosen to apply the solicitation. on the optical device.
[0036] The assembly of the optical block in the camera is done according to the conventional techniques of the state of the art. Unlike known autofocus cameras, no movement of the optical unit is required once it is assembled in the camera. Therefore, it is no longer necessary to provide the barrel with a thread and the frame of a tapping. There are mainly two methods to assemble the camera. In a first method called "waferlevel", the optical block is directly stacked on the image sensor. An example of such an assembly is illustrated in FIG. 13A, the optical block comprising in this case two lenses 20a, 20b separated by a spacer 20e. In this case, the image sensor 10 is often bonded to a substrate, for example made of glass, and its interconnections 100 are transferred to its rear face by a technique known as TSV (acronym for the English term "Through Silicon Vias"). "). A spacer 12 (also called "spacer" in the English terminology) is used in this case to position the optical block 20 at a suitable distance from the image sensor 10, that is to say the focal length of the image. optical block. According to a second method, known as the traditional method, the lenses forming the optical block can be assembled directly in the frame. In the case of a waferlevel assembly technique as illustrated in FIG. 13A, it is advantageous, although not essential, to place the optical device with the silicon substrate 302b towards the image sensor. Thus the glass substrate 302a of the optical zoom device 30 acts as a protection of the camera components. The membrane 301, which is more fragile, is thus protected from external aggressions. The region of the mechanically stressed device is therefore advantageously the silicon substrate 302b.
[0037] A simple structural solution for exerting permanent mechanical stress on the variable-focus optical device 30 consists in providing pads 211 on the optical block (for example on the upper surface of the last lens on which the optical device with focal length is variable), and to ideally place them in relation to the structures specifically provided for varying the optical power at rest of the optical zoom device (ie a groove 3020 formed in the substrate 302b in the case illustrated in FIG. 13A, or two holes 3021 oblong in the case illustrated in Figure 13B). Thus, during the subsequent focusing step, a more or less strong pressure exerted on the optical device with variable focal length will make it possible to modify its optical power at rest.
[0038] Said pads may be reported unitary elements, such as balls or unitary pieces. They may be shaped on the surface of the optical block (as shown in FIG. 13A) or of the optical device with variable focal length itself by any appropriate technique such as, for example, screen printing, dispensing, stamping, thermoforming, molding, etc. The pads may be made of metallic materials (for example Cu, Al, Pb alloys, Sn / Cu alloys, Ni, ...), ceramics (for example AlN, Al 2 O 3, etc.) or organic (such as glues, films resins). The coefficients of thermal expansion of the retained materials can be chosen so that, once the focusing is achieved, the structures compensate for any temperature drift in the optical power at rest of the optical device with variable focal length and / or the block. optical. Such pads arranged on the optical block may also be suitable if no particular complementary structure is provided on the variable focus optical device. However, in the advantageous case of FIG. 13A, where respective complementary structures 3020, 211 on the variable-focus optical device 30 and on the optical block 30 are provided, said structures can play, in addition to their role of mechanical stressing of the device. optical zoom lens, a self-aligning role 15 of the optical device with variable focus on the optical block. The centering of the optical device with variable focal length can be critical, such an approach can be particularly interesting. An alternative solution consists in placing a structure on the optical block with respect to a geometrical characteristic of the optical device with variable focal length. In the embodiment illustrated in FIG. 14A, no special structure is required on the variable focus optical device 30. The aperture created in the silicon substrate 302b to disengage the central portion 301a of the membrane and the device actuator 304 is used. Opposite the periphery of this opening, a protruding crown 212 having an inclined face is integrated on the optical unit 20. The angle of the inclined face of the crown 212, which cooperates with the aforementioned opening in the substrate 302b, participates the self-centering of the optical device with variable focal length 30 on the optical unit 20. It is also advantageous to avoid any pivoting of the optical device with variable focal length with respect to the optical unit during assembly and to guarantee the parallelism between these two elements.
[0039] The solutions presented above for a waferlevel assembly technique, can also be used in the case of traditional assembly of the optical block in a frame, as illustrated in FIGS. 15 and 16. According to these traditional assembly techniques , the mount 22 may play an additional role and include the structure (s) of solicitation. In the example of FIG. 16, the variable-focus optical device 30 is assembled on the optical unit 20 via the frame 22, said frame carrying pads 211 cooperating with the annular groove 3020 to enable the exercise to be exercised. a mechanical bias on the optical device with variable focal length 30. In the case of FIG. 15, the variable-focus optical device 30 is assembled directly on the optical unit 20 which is itself fixed on the mount 22. Plots The focus of the camera is required to ensure that the objects at infinity and captured by the camera are sharp. During this operation, an acquisition of images of an object (a pattern most often) placed at infinity or at least at a sufficiently large distance from the camera is achieved. In the present invention and unlike known techniques, the optical block is not moved. In parallel, a bias is exerted on the optical device with variable focal length. During this operation, the mechanical stress applied to the optical device with variable focal length is varied in order to vary its optical power at rest) and several image acquisitions are performed. An analysis of these images (often the modulation transfer function (MTF)) makes it possible to determine the mechanical stress corresponding to a maximum sharpness at infinity.
[0040] There are various ways to apply this bias to the optical zoom device. According to one embodiment of the invention, this focusing operation is performed simultaneously with the assembly operation of the optical device with variable focal length in the camera. For a bonding assembly as illustrated in FIG. 17A, glue 213 may be dispensed or screen printed on the optical device with variable focal length or on the optical block 20, advantageously at the level of the structures 211 provided for biasing the optical device. with variable focus. During the transfer of the optical zoom device 30 to the optical unit 20, the force exerted to crush the glue 213 is gradually increased.
[0041] By simultaneously performing image analysis, the optimal bias that corresponds to the maximum sharpness of the image can be determined. At this time, before releasing this stress, the glue 213 is polymerized to maintain the optical zoom device 30 in this state of deformation, which becomes permanent. In this way, the focus of the camera was achieved by adjusting the power at rest of the variable focus optical device as shown in Fig. 17B. In the above example, the glue and the pads may form the same material. By using certain UV glues that also polymerise thermally. The glue can be dispensed or screen printed to form the studs, expose it to UV (which will have the effect of hardening the glue and thus form shims), positioning the optical device 35 with variable focal length by adjusting the pressure and finishing the gluing. by polymerizing the glue thermally. Another solution for applying this bias on the optical zoom device during the focusing operation is to keep in the optical unit 3029644 20 a thread / tapping system. In this case, illustrated in FIGS. 18A and 18B, this system is no longer intended to move the barrel but to exert a greater or lesser stress on the optical device with variable focal length 30. A tapping 220 is made in the frame 22 An additional cover 23 containing a thread 230 complementary to the tapping 220 is used. The variable-focus optical device 30 is placed in the cover 23. The cover 23 is progressively screwed into the mount 22 and a biasing is thus progressively applied to a variable-focus optical device 30 via the pads 211 provided on the optical block. 20. Once the position providing the maximum sharpness determined by the analysis of the acquired images, the cover 23 10 is held in position on the frame 22 for example by gluing or by local melting 231 (see Figure 17B). Such an approach development has the advantage of being able to use the equipment traditionally used for this operation. Indeed, seen from the outside, the structure of the camera (hood / frame) remains close to the conventional structure (barrel / mount).
[0042] This thread / tapping approach can also be applied to a waferlevel configuration. For example, a tapping is performed in a part intended to apply the bias on the optical device with variable focal length. This piece is deposited or assembled on the last lens of the camera. A cover containing the optical device with variable focal length is then assembled on this part. The focus is ensured by more or less screwing the hood into the threaded part. This solution is particularly attractive for "low resolution" cameras. Indeed, the size of the camera and its manufacture at the wafer scale are not affected by this debugging solution. The advantages relating to this manufacturing technique are therefore preserved while allowing to benefit from the means of development used traditionally. In the figures presented so far, the connection of the variable-focus device was not shown for reasons of simplification. The following description addresses this topic. The development as embodied in the invention may also participate in the electrical connection of the variable focus optical device. Indeed, the stress exerted to vary the optical power at rest of the optical device with variable focal length can also participate in making its interconnection with the image sensor or the substrate. Conversely, the interconnection solution can participate in the solicitation of the optical device with variable focal length. For the sake of simplicity of the drawings, FIG. 19 illustrates a variable focus optical device 35 comprising connection pads 305 located at the periphery of the device (there are many other possible positions with respect to these connection pads). These pads are two in number and are positioned in the case of Figure 19 above the adhesive bead 302c. This is also an example among many others. The optical device with variable focal length may possibly have more interconnect pads (these pads may be at any level of the technological stack). In the state of the art, there are several ways to electrically connect a variable focus device located in a camera. A first approach is to pass the interconnections 206 in the optical unit 20, as shown in Figures 20A (waferlevel assembly) and 20B (traditional assembly). Among the known solutions, mention may be made of solutions based on conductive adhesives (vias are made in the camera and are filled with conductive materials such as silver-loaded adhesives or copper-laden inks, for example). It is also possible to use rigid elements such as "Pogo TM pin" type metal springs or metal rods. The interconnections thus made connect the variable-focus device to the image sensor or the camera substrate which itself is connected to the outside (motherboard of the mobile phone for example). It is through these interconnections that the operating voltage can be applied to the variable focus device. A second approach consists in passing the interconnections outside the optical block, as illustrated for example in FIG. 21. In this case, a substrate 207 (advantageously flexible of FPC type (acronym for the English term "Flexible Printed Circuit") The interconnection is in this case conductive tracks 208 (typically copper for a FPC polyester or polyimide for example) plotted on the substrate 207. This substrate is then folded along the frame 22 to minimize the bulk of the camera and then connected to the substrate 11 of the camera by means of conventional techniques (adapted connector, local welding, etc.). 22B relate to a waferlevel assembly technique The two electrical interconnections 206 made in the optical block of the camera are duplicated to produce two structures 211 of solicitation of the optical device with variable focal length. These two additional structures 211 do not provide electrical function but only a mechanical stressing function. According to such an approach, it is necessary to guarantee the electrical connection of the optical MEMS over the entire range of stresses intended to vary the initial optical power of the MEMS.
[0043] It is advantageous to place the bias structures and the electrical contact pads in the corner (s) of the optical zoom device. Indeed, the often circular geometry of the lenses and the rectangular or square shape of the optical devices with variable focal length, which is due to the waferlevel fabrication and the cutting, induce 3029644 22 zones useless from an optical point of view in the corners . These areas are therefore used to integrate these elements while minimizing the impact on the size of the optical device with variable focal length and therefore the camera (see Figure 23). By judiciously placing the contact pads on the optical device with variable focal length, it is possible to make the electrical interconnections play the role of a biasing structure. Indeed, by placing the pads of electrical contacts in the region of the optical zoom device sensitive to the stress, it is possible to simultaneously perform the electrical interconnection and the mechanical stress of the optical device with variable focal length (see FIGS. 24C).
[0044] By structuring the electrical contact pad of the optical device with variable focal length (by increasing its thickness for example) or by adding a structure participating in the interconnection such as a stud bump (in conductive polymer or in metal such as gold ), the stud and the solicitation structure can then form more than one and the same element.
[0045] By thus pooling the functions (electrical connection and mechanical stress), the number of structures can be optimized and the size of the camera reduced. FIG. 25 thus illustrates an assembly example using a thread / tapping system as described above. The optical device with variable focal length has, in the substrate 302b, a groove 3020 allowing the application of a permanent mechanical stress. Two interconnection pads 305 are arranged at the bottom of this groove 3020. Two interconnection structures 206 extend through the optical block and come both to provide electrical contact with the interconnection pads 305 and to mechanically bias the device optical zoom. The examples illustrated in FIGS. 22B and 25 corresponding to a waferlevel assembly technique can also be applied by analogy to a conventional joining technique, as illustrated respectively in FIGS. 26 and 27. The interconnection structures and / or or solicitation may possibly traverse the frame and / or all the lenses (in the non-optical area). The threading / tapping system used to bias the variable focus optical device must be compatible with the requirements for the interconnection of the optical zoom device. Most of the time, the electrical contacts on the substrate or the image sensor being positioned at a specific location, the contacts of the optical device with variable focal length must be at a given location, in front of the planned interconnection. It may be necessary in this case to avoid any rotation of the optical device with variable focal length and to apply to it only a translational movement. Figs. 28A-28C illustrate such an embodiment. The optical device with variable focal length 30 is received in a notch 241 of a part 24 having a thread 240 cooperating with a tapping 230 of the cover 23. The shape of the notch 241 is complementary to that of the optical device with variable focal length 30 - which has no symmetry of revolution - and thus prevents any rotation of the optical device with variable focal length when the cover 23 is screwed onto the part 24. The interconnection pads 305 of the optical device with variable focal length are arranged on the substrate 302b opposite the anchoring zone of the membrane. When the cover 23 is screwed onto the part 24, the optical device with variable focal length is compressed, which induces a mechanical stress on the interconnection pads 305 on the substrate 302b. Finally, Figs. 29A and 29B illustrate a conventional assembly mode in which the electrical connections of the optical zoom device are arranged outside the optical block. In this example, stud bumps 305 are reported on the optical device with variable focal length before assembly. These stud bumps play here a role in the electrical connection of the optical device with variable focus but also in the adjustment of its initial optical power. The studs bump are positioned in this example on the optical device with variable focus but they could as well be positioned on the additional substrate 207 opposite the contact pads of the optical device with variable focal length. Naturally, there is a wide variety of possible embodiments and the invention is in no way limited to the particular examples illustrated. 20
权利要求:
Claims (17)
[0001]
CLAIMS1 An autofocus camera (1) comprising: - an image sensor (10), - an optical block (20) comprising a plurality of lenses with fixed focal length, - an optical device (30) with a variable focus comprising: - a membrane ( 301) deformable, - a support (302) to which a peripheral anchoring zone (301c) of said membrane is bonded, - a cavity (303) filled with a constant volume of a fluid, said cavity being delimited at least by part by said membrane (301) and a wall of the support (302), - a device (304) for actuating a region (301b) of the membrane located between the peripheral anchoring zone (301c) and a central portion Diaphragm (301a) configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume toward the center or periphery of the cavity (303), wherein at least one region distinct from the central portion (301a) and the actuating region (301b) of e the membrane is mechanically stressed permanently so as to cause permanent deformation of the central portion of the membrane by the fluid, the focal length of the optical device (30) at rest under the effect of said mechanical stress (S) being different from the focal length of said optical device at rest before the application of said bias.
[0002]
2. Camera according to claim 1, characterized in that said mechanical stress comprises a force, a pressure or a moment.
[0003]
3. Camera according to one of claims 1 or 2, characterized in that the support (302) comprises a first substrate (302a) defining the bottom of the cavity and a second substrate (302b) secured to the anchoring zone ( 301c) of the membrane, the first substrate and the second substrate being bonded by an adhesive bead (302c) defining a circumferential wall of the cavity (303).
[0004]
4. Camera according to claim 3, characterized in that the biased region is located in the second substrate (302b). 3029644 25
[0005]
5. Camera according to claim 4, characterized in that the biased region is a locally thinner region of the second substrate (302b).
[0006]
6. Camera according to claim 5, characterized in that the biased region is a region of the second substrate (302b) through which the anchoring zone (301c) of the membrane is exposed directly to said bias (S).
[0007]
7. Camera according to claim 4, characterized in that the biased region is a locally thicker region of the second substrate (302b). 10
[0008]
8. Camera according to one of claims 3 to 7 characterized in that the stressed region is located in the bead of adhesive (302c).
[0009]
9. Camera according to one of claims 3 to 8, characterized in that the region 15 biased is located in the first substrate (301).
[0010]
10. Camera according to one of claims 1 to 9, characterized in that the cavity (303) containing the fluid is divided between a central cavity (303a) facing the central portion (301a) of the membrane and a peripheral cavity (303b) in fluid connection with the central cavity (303a) by at least one channel (303c), and in that the biased region is opposite said peripheral cavity (303b).
[0011]
11. Camera according to one of claims 1 to 10, characterized in that the permanent mechanical stress is exerted by at least one protrusion extending from the optical block to the biased region of the variable focus device.
[0012]
12. Camera according to one of claims 1 to 11, characterized in that it comprises interconnection pads providing an electrical connection between the image sensor and the respective electrical contacts of the optical zoom device 30 arranged in the region solicited, the permanent mechanical stress being provided by said interconnection pads.
[0013]
13. Camera according to one of claims 1 to 12, characterized in that the image sensor, the optical block and the variable focus device are each integrated in a substrate and in that said substrates form a stack. 3029644 26
[0014]
14. Camera according to one of claims 1 to 12, characterized in that the optical block and the variable-focus device are arranged in a frame integral with the image sensor. 5
[0015]
15. Camera according to one of claims 1 to 14, characterized in that the thermal expansion coefficients of the application means of the permanent mechanical stress are selected so as to compensate for any temperature drift of the optical power at rest of the optical device with variable focal length and / or optical block. 10
[0016]
An optical device (30) with variable focal length for integration with an autofocus camera (1) comprising: - a deformable membrane (301), - a support (302) to which a peripheral anchoring zone (301c) of said membrane is connected, 15 - a cavity (303) filled with a constant volume of a fluid, said cavity being delimited at least in part by said membrane (301) and a wall of the support (302), - a device (304) actuating a region (301b) of the membrane located between the peripheral anchoring zone (301c) and a central portion (301a) of the membrane, configured to flex by application of an electrical actuation voltage of so as to move a portion of the fluid volume towards the center or the periphery of the cavity (303), characterized in that it comprises at least a region distinct from the central portion (301a) and the actuating region ( 301b) of the diaphragm configured to be mechanically stressed by my permanently by a component of the autofocus camera (1) so as to cause permanent deformation of the membrane by the fluid, the focal length of the optical device at rest under the effect of said mechanical stress being different from the focal distance of said device optical at rest before the application of said solicitation. 30
[0017]
17. A method of manufacturing an autofocus camera (1) according to one of claims 1 to 15, comprising: - the assembly of the optical block (20) on the image sensor (10), - the assembly of the an optical device (30) with variable focal length on the assembly formed by the optical block and the image sensor, said assembly comprising the application of a mechanical bias on a region of said device separate from the central portion and the region of actuating the membrane, said biasing having the effect of displacing a portion of the fluid volume and deforming the central portion of the membrane, so as to vary the focal length of the optical device at rest, - simultaneously with the application of said mechanical stress, analysis of images acquired by the camera and determination of a mechanical stress generating the desired focus, - finalization of the assembly so as to permanently apply said mechanical stress determined.
类似技术:
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同族专利:
公开号 | 公开日
WO2016087602A1|2016-06-09|
FR3029644B1|2018-01-12|
US10261392B2|2019-04-16|
EP3227739A1|2017-10-11|
US20170322478A1|2017-11-09|
EP3227739B1|2021-08-18|
CN107209347A|2017-09-26|
CN107209347B|2019-11-12|
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法律状态:
2016-01-22| PLFP| Fee payment|Year of fee payment: 2 |
2016-06-10| PLSC| Publication of the preliminary search report|Effective date: 20160610 |
2016-11-11| PLFP| Fee payment|Year of fee payment: 3 |
2017-07-14| TP| Transmission of property|Owner name: WEBSTER CAPITAL LLC, US Effective date: 20170614 |
2017-10-12| PLFP| Fee payment|Year of fee payment: 4 |
2018-10-11| PLFP| Fee payment|Year of fee payment: 5 |
2019-10-14| PLFP| Fee payment|Year of fee payment: 6 |
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2021-11-08| PLFP| Fee payment|Year of fee payment: 8 |
优先权:
申请号 | 申请日 | 专利标题
FR1461907|2014-12-04|
FR1461907A|FR3029644B1|2014-12-04|2014-12-04|AUTOFOCUS CAMERA AND VARIABLE FOCAL OPTICAL DEVICE INTENDED TO BE INTEGRATED WITH SUCH A CAMERA|FR1461907A| FR3029644B1|2014-12-04|2014-12-04|AUTOFOCUS CAMERA AND VARIABLE FOCAL OPTICAL DEVICE INTENDED TO BE INTEGRATED WITH SUCH A CAMERA|
EP15805450.2A| EP3227739B1|2014-12-04|2015-12-03|Autofocus camera and optical device with variable focal length intended to be integrated into such a camera|
CN201580064402.0A| CN107209347B|2014-12-04|2015-12-03|It automatic auto-focusing camera and is intended to be integrated into and such magazine there is pancratic optical device|
US15/531,337| US10261392B2|2014-12-04|2015-12-03|Autofocus camera and optical device with variable focal length intended to be integrated into such a camera|
PCT/EP2015/078563| WO2016087602A1|2014-12-04|2015-12-03|Autofocus camera and optical device with variable focal length intended to be integrated into such a camera|
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